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AbstractAbstract
[en] Polycrystalline silicon (poly-Si) thin-films are made on planar and textured glass substrates by solid phase crystallization (SPC) of in situ doped amorphous silicon (a-Si) deposited by electron-beam evaporation. These materials are referred to by us as EVA materials (SPC of evaporated a-Si). The properties of EVA poly-Si films are characterised by Raman microscopy, transmission electron microscopy, and X-ray diffraction. A narrow and symmetrical Raman peak at a wave number of about 520 cm-1 is observed for all samples, showing that the films are fully crystallized. X-ray diffraction (XRD) reveals that the films are preferentially (111)-oriented. Furthermore, the full width at half maximum of the dominant (111) XRD peaks indicates that the structural quality of the films is affected by the a-Si deposition temperature and the surface morphology of the glass substrates. A-Si deposition at 200 instead of 400 deg. C leads to an enhanced poly-Si grain size. On textured glass, the addition of a SiN barrier layer between the glass and the Si improves the poly-Si material quality. No such effect occurs on planar glass. Mesa-type solar cells are made from these EVA films on planar and textured glass. A strong correlation between the cells' current-voltage characteristics and their crystalline material quality is observed
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S0040-6090(06)00105-2; Copyright (c) 2006 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
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Journal Article
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BEAMS, COHERENT SCATTERING, CRYSTALS, DIFFRACTION, DIRECT ENERGY CONVERTERS, ELECTRON MICROSCOPY, ELEMENTS, EQUIPMENT, FILMS, LEPTON BEAMS, MATERIALS, MICROSCOPY, PARTICLE BEAMS, PHASE TRANSFORMATIONS, PHOTOELECTRIC CELLS, PHOTOELECTRIC EFFECT, PHOTOVOLTAIC CELLS, SCATTERING, SEMIMETALS, SOLAR EQUIPMENT, TEMPERATURE RANGE
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