No abstract available

[en] The dependence of the sputtering yield and efficiency on the angle of incidence has been calculated using exact methods for treating half-space problems. The yield is found to increase with angle of incidence and to pass through a maximum value around 80⁰ to 85⁰. The efficiency increases monotonically with angle of incidence and does not exhibit a maximum except at 90⁰. The results which are for self-sputtering and employ hard-sphere scattering agree qualitatively with experimental results. (author)

[en] The forward form of the Boltzmann equation is employed to obtain a new closed form expression for the path length distribution function of particles emitted from a plane source in an infinite medium. The power law cross section is used and the equations are solved by the use of Mellin transforms. We can obtain the spatial moments of the distribution function and, for certain restrictive conditions, study the influence of electronic stopping upon them. An asymptotic analysis is developed which enables the large-depth behaviour deduced earlier by Winterbon (Rad. Effects; 15:73 (1972)) to be recovered and extended. (author)