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[en] The bases of Rutherford ion backscattering and its combination with channeling effect technique are reviewed. This combined method is recently referred to as Backscattering Spectrometry. The measurement of chemical compositions, the detection of crystal defects etc are dealt with. Comparison with other surface analysis methods is also given. The review was delivered as a lecture during the ''International School for Surface Physics'' (Varna, Bulgaria, Sep 18 - Oct 20, 1980). (author)
Source
Feb 1981; 37 p; ISBN 963 371 785 X; 
; 30 refs.
; 30 refs.