[en] When a solid surface is subjected to a bombardment of energetic ions, material is ejected from the surface in a process known as sputtering. A part of the sputtered material is ionized and these secondary ions can be analyzed with a mass spectrometer according to a technique known as secondary ion mass spectrometry (SIMS). A description is presented of the present status of geochemical and cosmochemical applications of the ion microprobe. Attention is given to the sputtering event, molecular ion interferences, aspects of isotopic fractionation, secondary ion intensities in polycomponent materials, and questions of trace element analysis. Geochemical applications of the ion microprobe are based on certain advantages over other analytical techniques. These advantages are related to high sensitivity, low background, and the capability of in situ analysis of isotopic composition. The distribution of trace elements in minerals is considered, along with isotope anomalies, isotope zoning, diffusion studies, and depth profiling