Lattice strain from holes in heavily doped Si:Ga
Kavanagh, K.L.; Chang, J.C.P.; Cargill, G.S. III; Boehme, R.F.
Ion beam processing of advanced electronic materials1989
Ion beam processing of advanced electronic materials1989
AbstractAbstract
[en] Heavily doped Si:Ga has been prepared by liquid phase epitaxy (LPE) and by ion-implantation with rapid thermal annealing (RTA) or laser annealing (LA). Peak substitutional Ga concentrations obtained by each technique were 1.5, 2.5 and 2.9 x 1020 cm-3, respectively. Substitutional fractions (> 90%) were similar in the three types of substitutional Ga atom in Si of +0.9 ± 0.1 x 10-24 cm3/atom was measured by double crystal x-ray diffraction. The average nearest neighbor Si-Ga bond length measured with extended x-ray absorption fine structure (EXAFS) was 0.237 ± 0.004 nm, indistinguishable, to within experimental error, from the intrinsic Si-Si bond length, 0.235 nm, indistinguishable, to within experimental error, from the intrinsic Si-Si bond length, 0.235 nm. Combining these two results the lattice strain per hole in the Si valence band was calculated, +0.4 ± 0.8 x 10-24 cm3. This result complements the lattice contraction per electron in the Si conduction band (-1.8 ± 0.4 x 10-24 cm3) already reported for Si:As. 15 refs., 4 figs., 1 tab
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Cheung, N.W.; Marwick, A.D.; Roberto, J.B. (eds.); Oak Ridge National Lab., TN (USA); 393 p; 1989; (Paper 8) p. 6; Symposium on ion beam processing of advanced electronic materials; San Diego, CA (USA); 25-27 Apr 1989; NTIS, PC A17/MF A01 as DE89017342
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