Continuous-action gas-ion source with a beam of large cross-section
AbstractAbstract
[en] Gas-ion source generating a 200 mm diameter ion beam with nonuniformity of current density distribution by the beam cross section of ≤±10% and current of up to 30 mA under the accelerating voltage of up to 50 kV is described. Nitrogen, argon and air are used as working gases. Plasma, emitting ions is generated by volumetric reflective discharge, initiated and maintained by electrons injected to it from the supplementary reflective discharge with cold cathodes. Ion acceleration and beam shaping are realized by three-electrode multiaperture ion-optical system
Original Title
Istochnik gazovykh ionov nepreryvnogo dejstviya s puchkom bol'shogo secheniya
Primary Subject
Record Type
Journal Article
Journal
Country of publication
Descriptors (DEI)
Descriptors (DEC)
Reference NumberReference Number
INIS VolumeINIS Volume
INIS IssueINIS Issue