AbstractAbstract
[en] The cylindrical plasma flow caused by dc discharge along a magnetic field is transformed into a sheet plasma flow (13 cm in width, 40 cm in length and about 3 mm in thickness) while electron components (up to 100 A) in the plasma flow are accelerated by a power supply of 80 V to 220 V. In the first experiment, the sheet plasma where an argon ion current density of 19 mA/cm2 is extracted is produced under an argon gas pressure of 1.3 x 10-1 Pa, an electron acceleration voltage VA=100 V and an electron acceleration current IA=50 A. In the second experiment, the sheet plasma is produced under an argon pressure of 5.3 Pa, VA=100 V and IA=100 A. In the third experiment, the sheet plasma is produced under a hydrogen gas pressure of 52 Pa, VA=220 V and IA=100 A. These electron acceleration sheet plasmas are very useful for large-area and high-speed plasma processes. It should be noted that the ordinary vacuum conductance of the electron acceleration anode slit is greatly reduced to 1/8 of the original value when an electron acceleration current of 100 A enters the acceleration anode region through the slit. (author)
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