[en] A process combining hydrofluoric acid (HF) and Ar⁺ ion milling has been used to make YBa₂Cu₃O_x/SrTiO₃/YBa₂Cu₃O_x(YBCO/STO/YBCO) multilayer test circuits. Low-angle steps can be readily etched in STO and YBCO films with this process. YBCO lines crossing 5 degree steps have about the same critical temperature T_c (89 endash 90 K) and critical current density J_c (approx-gt 1x10⁶ A/cm² at 86 K) as lines on planar surfaces. Via connections have the same T_c as other circuit components and adequate critical currents for most circuit designs. copyright 1996 American Institute of Physics