Recent developments in EUV reflectometry at the Advanced Light Source
Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B.
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (United States). Funding organisation: US Department of Energy (United States)2001
Ernest Orlando Lawrence Berkeley National Lab., Advanced Light Source, Berkeley, CA (United States). Funding organisation: US Department of Energy (United States)2001
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1 Feb 2001; [vp.]; SPIE Conference; Santa Clara, CA (United States); 27 Feb - 2 Mar 2001; AC03-76SF00098; Available from www.als.lbl.gov
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