High-current solid-feed ion source
Taylor, T.; Wills, J.S.C.; Douglas, E.C.; Tran Ngoc, T.
Atomic Energy of Canada Limited, Chalk River, Ontario (Canada)1989
Atomic Energy of Canada Limited, Chalk River, Ontario (Canada)1989
AbstractAbstract
[en] Reliability is of paramount importance for industrial ion-beam systems. However, manufacturing processes often involve the operation of ion sources at elevated temperatures with corrosive and erosive feeds. Under these conditions, the durability of various components, and especially cathodes, may be reduced by physical sputtering and chemical erosion. The duoPlGatron ion source, having two chambers, is well suited to minimizing this problem. The first chamber houses the cathode and serves as an electron generator for the second PIGing, or reflex arc, chamber where most of the extracted ions are created. Consequently, the first chamber can be operated on an inert gaseous feed chosen to maximize filament lifetime, while the second chamber is fed a noxious gas or vapor that gives rise to the ion of interest. This principle has already been applied to a high-current oxygen source that was developed for the Eaton NV-200 high-energy ion implanter. The technique has also been demonstrated with the gases phosphine, arsine, and boron trifluoride as secondary feeds. The present paper reports on the operation of a modified duoPlGatron with vapor genera ed by an external oven. (author)
Primary Subject
Source
1989; 3 p; Available from Atomic Energy of Canada Limited, Chalk River, Ontario (Canada). Also published in Review of Scientific Instruments, Vol. 61. no.1, p. 454-456, January 1990; 8 refs., 2 tabs., 5 figs.
Record Type
Report
Report Number
Country of publication
Descriptors (DEI)
Descriptors (DEC)
Reference NumberReference Number
INIS VolumeINIS Volume
INIS IssueINIS Issue