Gas sensor based on nanosize In2O3:Ga2O3 film
AbstractAbstract
[en] In2O3:Ga2O3 (96:4 wt.%) nanosize films were deposited on glass-ceramic substrates by high-frequency magnetron sputtering. The surfaces of prepared films were investigated by scanning electron microscopy, the sizes of grains were determined, and the thicknesses of films were measured. The gas sensing structures was completed through ion-beam sputtering deposition of very thin palladium catalytic layer and gold interdigitated ohmic contacts on the prepared In2O3:Ga2O3 films. The response of the glass-ceramic/In2O3:Ga2O3 (96:4 wt.%)/Pd structure to different concentrations of the propane-butane mixture and also to methane at temperatures of a working body from 200 to 350 degree was investigated
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Source
Available from National Academy of Sciences of Armenia; 14 refs., 6 figs.
Record Type
Journal Article
Journal
Izvestiya National'noj Akademii Nauk Armenii. Fizika; ISSN 1025-5613; ; CODEN IAAFF8; v. 45(6); p. 447-455
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