[en] TiO₂ films with potential for dye-sensitized solar cells were deposited by using reactive medium frequency magnetron sputtering deposition. Two groups of films were prepared respectively by changing the oblique angle of the substrate and the total pressure. Scanning electron microscopy and spectroscopic ellipsometry measurements were used to characterize the deposited TiO₂ films. The result showed that increasing the oblique angle and increasing the total pressure were both effective in increasing the porosity of the TiO₂ films.