Mass spectroscopy of ion flows in non-sputtering magnetron discharge
Agejchenkov, D.G.; Kaziev, A.V.; Kolodko, D.V.
XI Conference «Modern facilities of plasma diagnostics and their application». Collection of abstracts2018
XI Conference «Modern facilities of plasma diagnostics and their application». Collection of abstracts2018
AbstractAbstract
No abstract available
Original Title
Mass-spektrometriya ionnykh potokov v neraspylyayushchem magnetronnom razryade
Primary Subject
Source
Kurnaev, V.A.; Savelov, A.S.; Kostyushin, V.A. (eds.); Ministerstvo Nauki i Vysshego Obrazovaniya Rossijskoj Federatsii, Moscow (Russian Federation); Nauchnyj Sovet po Fizike Nizkotemperaturnoj Plazmy RAN, Moscow (Russian Federation); Natsional'nyj Issledovatel'skij Yadernyj Univ. «MIFI», Moscow (Russian Federation); 196 p; ISBN 978-5-7262-2513-5; ; 2018; p. 126-127; 11. Conference 'Modern facilities of plasma diagnostics and their application'; XI Konferentsiya «Sovremennye sredstva diagnostiki plazmy i ikh primenenie»; Moscow (Russian Federation); 13-15 Nov 2018; 2 refs., 2 figs.
Record Type
Book
Literature Type
Conference; Numerical Data
Country of publication
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