Plasma interaction with boundary surfaces of radiofrequency capacitive low pressure discharge
Savinov, V.P.; Chervyakov, A.V.; Yakunin, V.G.; Kruglov, M.S.; Ryabyj, V.A.
V International conference «Laser, plasma research and technologies» LaPlaz-2019. Collection of scientific papers. Part 22019
V International conference «Laser, plasma research and technologies» LaPlaz-2019. Collection of scientific papers. Part 22019
AbstractAbstract
[en] The interaction of the radio frequency capacitive discharge (RFCD) plasma with its active (electrodes) and passive (walls) boundary surfaces is considered. When plasma interacts with active surfaces, there is a complex set of physical processes – generation of DC electric fields, electron emission, formation of pulsed electron beams, excitation of various instabilities and others
Original Title
Vzaimodejstvie plazmy s granichnymi poverkhnostyami v VCh emkostnom razryade nizkogo davleniya
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Source
Ministerstvo Nauki i Vysshego Obrazovaniya Rossijskoj Federatsii, Moscow (Russian Federation); Natsional'nyj Issledovatel'skij Yadernyj Univ. «MIFI», Moscow (Russian Federation); 388 p; ISBN 978-5-7262-2545-6; ; 2019; p. 93-94; LaPlaz-2019: 5. international conference on laser, plasma research and technologies; V Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii» LaPlaz-2019; Moscow (Russian Federation); 12-15 Feb 2019
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Book
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Conference
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