Characteristics of a high-current impulse magnetron discharge during the reactive sputtering of aluminum
[en] The characteristics of a high-current impulse magnetron discharge have been studied during the reactive sputter deposition of Al in Ar/O2 gas mixture. The dependence of deposition rate on oxygen content in the gas mixture has been measured for different power management regimes. The specific deposition rate values have been obtained for different ratios of on/off times
Source
Ministerstvo Nauki i Vysshego Obrazovaniya Rossijskoj Federatsii, Moscow (Russian Federation); Natsional'nyj Issledovatel'skij Yadernyj Univ. «MIFI», Moscow (Russian Federation); 388 p; ISBN 978-5-7262-2545-6; 
; 2019; p. 104; LaPlaz-2019: 5. international conference on laser, plasma research and technologies; V Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii» LaPlaz-2019; Moscow (Russian Federation); 12-15 Feb 2019
; 2019; p. 104; LaPlaz-2019: 5. international conference on laser, plasma research and technologies; V Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii» LaPlaz-2019; Moscow (Russian Federation); 12-15 Feb 2019