Deposition of nickel and tungsten oxide films in pulsed and stationary magnetron discharge regimes
Sergeev, N.S.; Kaziev, A.V.; Agejchenkov, D.G.; Kolodko, D.V.
VI International conference «Laser, plasma research and technologies – LaPlaz-2020». Collection of scientific papers. Part 22020
VI International conference «Laser, plasma research and technologies – LaPlaz-2020». Collection of scientific papers. Part 22020
AbstractAbstract
[en] Transparent oxide coatings with thicknesses of the order of hundreds nanometers were obtained on the conducting FTO sublayer. The deposition of oxide films of nickel and tungsten was carried out in stationary (dcMS) and pulsed (HiPIMS) magnetron discharge regimes. The films stoichiometry and the value of grain size were determined by X-ray diffraction analysis
Original Title
Osazhdenie oksidov nikelya i vol'frama v impul'snykh i statsionarnykh rezhimakh magnetronnogo razryada
Primary Subject
Source
Ministerstvo Nauki i Vysshego Obrazovaniya Rossijskoj Federatsii, Natsional'nyj Issledovatel'skij Yadernyj Univ. «MIFI», Moscow (Russian Federation); 370 p; ISBN 978-5-7262-2655-2; ; 2020; p. 193-194; 6. International conference ''Laser, plasma research and technologies - LaPlaz-2020''; VI Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii – LaPlaz-2020»; Moscow (Russian Federation); 11-14 Feb 2020; 4 refs., 1 fig.
Record Type
Book
Literature Type
Conference; Numerical Data
Country of publication
Descriptors (DEI)
Descriptors (DEC)
CHALCOGENIDES, COHERENT SCATTERING, DATA, DEPOSITION, DIFFRACTION, ELECTRIC DISCHARGES, ELECTRON TUBES, ELECTRONIC EQUIPMENT, ELEMENTS, EQUIPMENT, FILMS, FLUIDS, GASES, INFORMATION, MATERIALS, MICROSTRUCTURE, MICROWAVE EQUIPMENT, MICROWAVE TUBES, NANOMATERIALS, NICKEL COMPOUNDS, NONMETALS, NUMERICAL DATA, OXIDES, OXYGEN COMPOUNDS, PLASMA TECHNOLOGY, RARE GASES, REFRACTORY METAL COMPOUNDS, SCATTERING, SIZE, SPRAY COATING, SURFACE COATING, THIN FILMS, TRANSITION ELEMENT COMPOUNDS, TUNGSTEN COMPOUNDS
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