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Silicon substrates for nanoparticle gas sensors with embedded electrodes and planar surface

Hrkut, P. (Institute of Informatics SAS, 84507 Bratislava (Slovakia)); Kostic, I. (Institute of Informatics SAS, 84507 Bratislava (Slovakia)); Benkovicova, M. (Institute of Physics SAS, 84511 Bratislava (Slovakia)); Luby, S. (Institute of Physics SAS, 84511 Bratislava (Slovakia)); Kotlar, M. (Center for Nano-diagnostics, Slovak University of Technology, 81243 Bratislava (Slovakia))
24th International Conference on Applied Physics of Condensed Matter. Book of Abstracts2018

AbstractAbstract

[en] Standard ceramic substrates with patterned surface electrodes few hundred nm thick are not appropriate for advanced nanoparticle gas sensors. Smooth silicon planar substrates with embedded metallic electrodes are introduced in our work. They give the chance to cover the small substrate surface irregularities by fragile nanoparticle arrays and provide an opportunity to integrate sensors into electronic circuits. The suppression of high power consumption of integrated sensor heater due to the high thermal conductivity of Si is resolved using substrates hanging on thin contacting wires without getting in touch with the socket. Embedded Au electrodes were created in sputtered amorphous silicon layer by lift-off technique. The ridges at Au - a:Si interface were reduced due to improved Au wettability of a:Si vertical walls. γ-Fe₂O₃ nanoparticle deposits on the Si patterned substrates were studied.(authors)

Primary Subject

NANOSCIENCE AND NANOTECHNOLOGY (S77)

Source

Vajda, J. (ed.) (Institute of Nuclear and Physical Engineering, Institute of Electronics and Photonics, Faculty of Electrical Engineering and Information Technology, Slovak Univ. of Technology, Bratislava (Slovakia)); Jamnicky, I. (ed.) (Dept. of Physics,, Faculty of Electrical Engineering, University of Zilina, Zilina (Slovakia)); Institute of Nuclear and Physical Engineering, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava (Slovakia); Alumni Club of The Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava (Slovakia); Institute of Aurel Stodola, Liptovsky Mikulas, Faculty of Electrical Engineering, University of Zilina (Slovakia); Institute of Physics, Slovak Academy of Sciences, Bratislava (Slovakia); Slovak Physical Society, Bratislava (Slovakia). Funding organisation: Sponsors: New Technologies Research Centre, University of West Bohemia, Plzen (Czech Republic); European Structural and Investment Funds, Operational Programme Research, Development and Education, European Union, City of Brussels (Belgium); Ministry of Education, Youth and Sports, Prague (Czech Republic); NURECO o.z., Miloslavov (Slovakia); 51 p; ISBN 978-80-227-4799-8;

; 2 Jun 2018; 1 p; APCOM 2018: 24. International Conference on Applied Physics of Condensed Matter; Strbske Pleso (Slovakia); 20-22 Jun 2018; Available from http://kf.elf.stuba.sk/∼apcom/proceedings2018/

Record Type

Miscellaneous

Literature Type

Conference

Report Number

INIS-SK--2022-014

Country of publication

Slovakia

Descriptors (DEI)

GOLD, IRON OXIDES, NANOSTRUCTURES, SILICON, SOLID STATE PHYSICS, SPUTTERING

Descriptors (DEC)

CHALCOGENIDES, ELEMENTS, IRON COMPOUNDS, METALS, OXIDES, OXYGEN COMPOUNDS, PHYSICS, SEMIMETALS, TRANSITION ELEMENT COMPOUNDS, TRANSITION ELEMENTS

LanguageLanguage

English

Reference NumberReference Number

53119827

Related RecordRelated Record

53119816

INIS VolumeINIS Volume

INIS IssueINIS Issue

External URLExternal URL

http://kf.elf.stuba.sk/~apcom/proceedings2018/

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