Electrical Modeling of Lithographic Imperfections - researchr publication authors

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Tuck Boon Chan, Rani S. Ghaida, Puneet Gupta. Electrical Modeling of Lithographic Imperfections. In VLSI Design 2010: 23rd International Conference on VLSI Design, 9th International Conference on Embedded Systems, Bangalore, India, 3-7 January 2010. pages 423-428, IEEE, 2010. [doi]

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