ACM RESEARCH, INC.

ACM RESEARCH, INC.

Semiconductor Manufacturing

Fremont, California 1,996 followers

Wet processing technology, systems and products for IC manufacturing and wafer-level packaging.

About us

Founded in 1998 in Silicon Valley, ACM Research, Inc. provides wet processing technology, systems, and key manufacturing products targeted to a range of semiconductor IC manufacturing and wafer-level packaging applications. The company specializes in developing cleaning technologies for advanced semiconductor device manufacturing. Known for its expertise in ultra-low-K dielectric and copper integration, the company initially focused on stress-free copper polishing technology. Its first product was introduced in 2001 and sold to leading-edge wafer manufacturers in the U.S. In 2003, to address increasing challenges in defect reduction that plagued emerging generations of IC chips, ACM Research developed its innovative single-wafer cleaning equipment, which features the company’s proprietary Space Alternated Phase Shift (SAPS™) and Timely Energized Bubble Oscillation (TEBO™) megasonic cleaning technologies. In particular, ACM’s revolutionary TEBO technology is enabling future generations of semiconductor capability. These capabilities are delivered on high-throughput chamber and platform designs. In September 2006, ACM expanded its operations into Asia, and formed the subsidiary ACM Research (Shanghai), Inc. The company offers complete R&D, and engineering and manufacturing operations at its Zhangjiang Hi-Tech Park facility in Shanghai. Product Lines IC: FEOL Single-Wafer Clean BEOL Single-Wafer Clean Backside Clean Bench PR Stripper Wet Bench Single Wafer Recycle ECP SFP Furnace Advanced WLP: Coater Developer PR Stripper Scrubber Wet Etcher ECP Furnace Wafer Manufacturing: Single-Wafer Clean Single-Wafer Wet Etcher Furnace

Industry
Semiconductor Manufacturing
Company size
1,001-5,000 employees
Headquarters
Fremont, California
Type
Public Company
Founded
1998

Locations

  • Primary

    4378 Enterprise St

    Fremont, California 94538, US

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  • Building 4, No. 1690 Cailun Rd.

    Zhangjiang Hi-Tech Park

    Shanghai, China 201203, CN

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  • Building IC Design 604-1

    No.33-1 Xinda Rd.

    Wuxi, Jiangsu, China 214208, CN

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  • 402, Hyundai City Plaza 2106

    Gyeong chung-daero, Bubal-eup

    Icheon-si Gyeonggi-do, Republic of Korea 17332, KR

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  • ACM Research (Singapore) 3 Fraser Street, Duo Tower Level 08-21

    Singapore, Singapore 189352 , SG

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