Shanghai Vigour Technologies Co., Ltd

VIGOUR VUC-DISS connector

VIGOUR VSR-920 SERIES UHP GAS REGULATOR • Single-stage pressure regulator • 10μin. Ra surface finish • Minimized internal volume for short purge times • All materials used meet ASTM A479 / A484 / A276 standards • Internal connectors for pressure gauges • Flow capacity: to 2000 slpm • High control accuracy • Metal-to-metal seal to atmosphere • Simple outlet pressure limitation by hand-wheel • 100% helium-leak-tested • Tied-diaphragm design

VIGOUR VSR-910 SERIES UHP GAS REGULATOR • Single-stage pressure regulator • 15μin. Ra max. 10μin Ra max optional • design for bulk special gas supply system • Tied-diaphragm design with bellows sensing element • All materials used meet ASTM A479 / A484 / A276 standards • Metal-to-metal seal to atmosphere • 100% helium-leak-tested

VIGOUR VSR-610 SERIES UHP REGULATOR • Single-stage pressure regulator • 10μin. Ra surface finish (25μin. Ra optional) • Minimized internal volume for short purge times • All materials used meet ASTM A479 / A484 / A276 standards • Internal connectors for pressure gauges • High control accuracy • Metal-to-metal seal to atmosphere • Simple outlet pressure limitation by hand-wheel • 100% helium-leak-tested

VIGOUR VSR-510 UB SERIES UHP GAS REGULATOR • Single-stage pressure regulator • 10μin. Ra surface finish (25μin. Ra optional) • Minimized internal volume for short purge times • All materials used meet ASTM A479 / A484 / A276 standards • Internal connectors for pressure gauges • Flow capacity: to 30 slpm (standard), to 120 slpm (optional) • High control accuracy • Metal-to-metal seal to atmosphere • Simple outlet pressure limitation by hand-wheel • 100% helium-leak-tested • Tied-diaphragm design

VIGOUR VSR-210 SERIES UHP GAS REGULATOR • Single-stage pressure regulator • 10μin. Ra surface finish (25μin. Ra optional) • Minimized internal volume for short purge times • All materials used meet ASTM A479 / A484 / A276 standards • Internal connectors for pressure gauges • Force compensation has wider flow capacity • High control accuracy • Metal-to-metal seal to atmosphere • Simple outlet pressure limitation by hand-wheel • 100% helium-leak-tested • Tied-diaphragm design

VSR-100 UB series UHP regulator • Single-stage pressure regulator • 10μin. Ra surface finish (25μin. Ra optional) • Minimized internal volume for short purge times • All materials used meet ASTM A479 / A484 / A276 standards • Internal connectors for pressure gauges • Flow capacity: to 30 slpm (standard), to 120 slpm (optional) • High control accuracy • Metal-to-metal seal to atmosphere • Simple outlet pressure limitation by hand-wheel • 100% helium-leak-tested

VIGOUR VSR-53 series back pressure regulator Type:single-stage Inlet pressure P1:max. 300 bar Controlled pressure：see ordering info Materials body regulator：SS316L / chrome plated brass Valve seat:PCTFE Diaphragm:Hastelloy® C276 O-ring:Viton® (FKM) (option)Kalrez® (FFKM) Filter:SS 316L Inlets and Outlets:1/4”NPT(F) Temperature range:-30℃ to +74℃ Leak rate: (to atmosphere)1x10^-8 mbar l/s He  (via seat)1x10-6 mbar l/s He Flow capacity:CV=0.14 (<100bar) CV=0.1(100~300bar) Weight:2.2 kg

VIGOUR VSR-52 SERIES BACK PRESSURE REGULATOR Type:single-stage Inlet pressure P1:max. 50 bar Controlled pressure：see ordering info Materials body regulator：SS316L / chrome plated brass Valve seat:PCTFE Diaphragm:Hastelloy® C276 O-ring:Viton® (FKM) (option)Kalrez® (FFKM) Filter:SS 316L Inlets and Outlets:1/4”NPT(F) Temperature range:-30℃ to +74℃ Leak rate: (to atmosphere)1x10-8 mbar l/s He  (via seat)1x10-6 mbar l/s He Flow capacity:Cv=0.1 Weight:1kg

VIGOUR VSR-51 SERIES BACK PRESSURE REGULATOR Type:single-stage Inlet pressure P1:max. 300 bar Controlled pressure：see ordering info Materials body regulator：SS316L / chrome plated brass Valve seat:PCTFE Diaphragm:Hastelloy® C276 O-ring:Viton® (FKM) (option)Kalrez® (FFKM) Filter:SS 316L Inlets and Outlets:1/4”NPT(F) Temperature range:-30℃ to +74℃ Leak rate: (to atmosphere)1x10^-8 mbar l/s He  (via seat)1x10-6 mbar l/s He Flow capacity:CV=0.14 (<100bar) CV=0.1(100~300bar) Weight:2.2 kg