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Beneq’s P400A batch ALD tool played a key role in Sylvester Sahayaraj et al.'s research, enhancing ZnO thin films with Ge doping. The study highlights improved conductivity, optical transmittance, and a blue shift in the band gap, advancing their potential in optoelectronic applications. Check out: Tuning the Optical and Electrical Properties of ALD-Grown ZnO Films by Germanium Doping: https://hubs.li/Q02SVQd70 #ALDep #Optoelectronics #ThinFilms

Tuning the Optical and Electrical Properties of ALD-Grown ZnO Films by Germanium Doping

Tuning the Optical and Electrical Properties of ALD-Grown ZnO Films by Germanium Doping

pmc.ncbi.nlm.nih.gov

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