Vintage collection! You recognize this instrument? Around 1993 Raith and Orsay Physics built a very early and special FIB-SEM system for the Paul Scherrer Institute, Zurich, Switzerland. In this case, the FIB with ExB filter was top mounted and the SEM came from the back under an angle. One requirement was, that the chamber vacuum should reach „nearly“ ultra high vacuum. As a „one off“, I would not say that it was a very mature solution, but already an impressive piece of engineering at that time. Products may not be successful because they were ahead of their time, or too special, or not mature enough, or – even worse – killer applications weren´t well understood, like those in semiconductor failure analysis. But some „seeds“ were laid down for the companies success in FIB later.
And now, after 30 years, #fibsem can prepare lamellae a few nanometers thick for #TEM analysis. Great 👌
More than 30 years ago already... Indeed a nice piece of engineering...
Reminds me of our SEM/ebeam writing with the Hitachi MarkII. Now I own my own Hitachi, still waiting in the storage though.
Good to show the before and after evolution
Senior Mechanical Engineer
9moMemories I designed the first FEI dual beam system 1993 or so. It flopped, only sold three or so. We focused on single Beam Fibs next that succeeded, only later my dual beam design succeeded. I still have column parts from back then.