Ericco Inertial Technology’s Post

MEMS Gyroscope: Sensitive Structure | Detection Circuit | Integrated Package MEMS gyroscope is a kind of MEMS inertial sensor which uses Coriolis effect to detect the rotational angular rate of objects. It can integrate the sensitive structure and peripheral measurement and control circuit on the same silicon chip, and has the advantages of low cost, small size, light weight and low power consumption. The sensitive structure is the core component of MEMS gyro sensor, which is directly related to the performance of the gyroscope such as scale factor, zero bias and anti-vibration. This paper will introduce the basic knowledge of MEMS gyros in detail from the sensitive structure, detection circuit and integrated package of MEMS gyroscope. The rest part 👇 https://lnkd.in/gfhEHSHp

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