[en] The thin films of Al_xNb_1-x (95 ≥ x ≥ 20), Al_xMo_x (90 ≥ x ≥ 20) and Al_xTa_1-x (95 ≥ x ≥ 20) were prepared by magnetron codeposition at room temperature. The average film thickness was from 325 to 400 nm, depending on the film composition. The structure of the as-deposited films was examined by the X-ray diffraction. The stress of the films was determined from the substrate deformation by the profilometer, and the microhardness (load 2 mN) was examined by the micro- and nano-hardness device. For the purpose of the examination of the hardness, the samples were deposited onto the sapphire wafers, while the examination of the film stress, was performed by using thin glass substrates. For all the Al-(Nb, Mo, Ta) alloy compositions, the microhardness is predominantly under the influence of the harder element, and monotonically decreases with the increase of the aluminum content. However, the microhardness of the amorphous AlTa films was higher than the bulk value of a harder element (Ta) in the alloy. A simple empirical linear relationship between the Vickers hardness, the bulk value hardness of the transition metal (harder element) and the elastic energy fraction of the identation deformation, was established. The elastic energy fraction in the microhardness is also linearly correlated with the stress in films.

[en] We report on the formation of Ge/Si quantum dots with core/shell structure that are arranged in a three-dimensional body centered tetragonal quantum dot lattice in an amorphous alumina matrix. The material is prepared by magnetron sputtering deposition of Al_2O_3/Ge/Si multilayer. The inversion of Ge and Si in the deposition sequence results in the formation of thin Si/Ge layers instead of the dots. Both materials show an atomically sharp interface between the Ge and Si parts of the dots and layers. They have an amorphous internal structure that can be crystallized by an annealing treatment. The light absorption properties of these complex materials are significantly different compared to films that form quantum dot lattices of the pure Ge, Si or a solid solution of GeSi. They show a strong narrow absorption peak that characterizes a type II confinement in accordance with theoretical predictions. The prepared materials are promising for application in quantum dot solar cells. (paper)