Kabasawa, Mitsuaki; Nakayama, Kohichi; Shimada, Taihei; Yanagida, Kenichi; Yokomizo, Hideaki; Harami, Taikan.
Japan Atomic Energy Research Inst., Tokyo (Japan)1989
Japan Atomic Energy Research Inst., Tokyo (Japan)1989
AbstractAbstract
[en] Synchrotron Radiation Facility Project Team in JAERI had tried to preliminarily design the injection system of Large Synchrotron Radiation Facility in the fiscal year 1988. Concentrating on the basic design for the booster synchrotron in this injection system, we describe the general method to design the separated function synchrotron which is used to accelerate high energy electrons or positrons. The content of this paper is founded on the physics of single particle motion. And in the next report we will discuss about the collective beam dynamics, the phenomena occurred during acceleration, and so on. (author)
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Aug 1989; 69 p
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[en] The SHX-III system, categorized as a single-wafer high-current ion implanter, has been developed by SEN Corporation in order to meet all the requirements for high dose and relatively high mid-dose applications, including high-tilted multi-step implantation. Recently the three major advanced device types, namely logic devices, memory and imagers, started to require high-current ion implanters in diverse ways. The SHX-III is designed to fulfill such a variety of requirements in one system. The SHX-III has the same end station as the MC3-II/WR, SEN's latest medium current implanter, which has a mechanical throughput of 450 WPH. This capability and precise dose control system of the SHX-III causes dramatic productivity enhancement for application of mid-high dose, ranged between 5E13 to 2E14 atoms/cm2, usually performed by medium current ion implanters. In this paper the concept and performance of the SHX-III will be described, concerning influence of device characteristics. A concept and performance data of the SHX figure that this system can provide implant quality and productivity as far as the 32 nm node.
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17. international conference on ion implantation technology; Monterey, CA (United States); 8-13 Jun 2008; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
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Conference
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Hashimoto, Hiroshi; Shimada, Taihei; Kabasawa, Mitsuaki; Harami, Taikan; Yonehara, Hiroto; Nagai, Takahisa; Ogino, Teruhisa; Miyahara, Yoshikazu.
Japan Atomic Energy Research Inst., Tokyo (Japan)1991
Japan Atomic Energy Research Inst., Tokyo (Japan)1991
AbstractAbstract
[en] This paper describes the design, fabrication and test of the magnets which will be used in the synchrotron of the large synchrotron radiation facility (SPring-8). The magnets are dipole, quadrupole, sextupole and septum ones. These magnets have been fabricated as prototypes of magnets installed in the synchrotron. We plan to make an integral test connected with an electric power supply and to measure magnetic field in each magnet. (author)
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Mar 1991; 115 p
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[en] We describe progress in the Tohoku neutron time-of-flight (TOF) facilities improved to facilitate high resolution measurements for neutrons in the range 10 < or approx. En < or approx. 60 MeV. Efforts have been concentrated on completing the neutron detection system consisting of twelve neutron detectors, in which 23 l of NE213 liquid scintillator are encapsulated, and a CAMAC-based data acquisition system. A systematic study of the neutron detection efficiency has been performed by Monte Carlo calculation for monochromatic neutrons with En < or approx. 34 MeV. Results have been tested by counting neutrons from the 7Li(p, n)7Be reaction and comparing the yield with the absolute neutron fluence determined by activation. (orig.)
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Journal Article
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Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment; ISSN 0168-9002; ; CODEN NIMAE; v. 257(2); p. 189-196
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[en] A facility for neutron induced experiments has been developed using the neutron time-of-flight spectrometer with a beam swinger system at the Tohoku University cyclotron. Quasi-monoenergetic neutrons have been obtained as a secondary beam from the 7Li(p,n)7Be reaction at an incident energy of 37 MeV. Neutrons are available up to 40 MeV with an energy resolution of 650 keV (FWHM). Differential cross sections for scattered neutrons from 12C were measured over an angular range from 10deg to 145deg with a 44 m long flight path. (orig.)
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Numerical Data
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Nuclear Instruments and Methods in Physics Research, Section A; ISSN 0168-9002; ; CODEN NIMAE; v. 287(3); p. 455-459
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ANGULAR DISTRIBUTION, BEAM TRANSPORT, BERYLLIUM 7, CARBON 12, CARBON 12 TARGET, CHARGE-EXCHANGE REACTIONS, COLLIMATORS, DIFFERENTIAL CROSS SECTIONS, ELASTIC SCATTERING, ENERGY RESOLUTION, ENERGY SPECTRA, EXPERIMENTAL DATA, LIQUID SCINTILLATION DETECTORS, LITHIUM 7 TARGET, MEV RANGE 10-100, NEUTRON BEAMS, NEUTRON DETECTION, NEUTRON DETECTORS, NEUTRON REACTIONS, NEUTRON SOURCES, NEUTRON SPECTRA, NEUTRON SPECTROMETERS, NEUTRONS, PROTON REACTIONS, SECONDARY BEAMS, TARGET CHAMBERS, TIME-OF-FLIGHT SPECTROMETERS
ACCELERATOR FACILITIES, BARYON REACTIONS, BARYONS, BEAMS, BERYLLIUM ISOTOPES, BETA DECAY RADIOISOTOPES, CARBON ISOTOPES, CROSS SECTIONS, DATA, DAYS LIVING RADIOISOTOPES, DETECTION, DISTRIBUTION, ELECTRON CAPTURE RADIOISOTOPES, ELEMENTARY PARTICLES, ENERGY RANGE, EVEN-EVEN NUCLEI, EVEN-ODD NUCLEI, FERMIONS, HADRON REACTIONS, HADRONS, INFORMATION, ISOTOPES, LIGHT NUCLEI, MEASURING INSTRUMENTS, MEV RANGE, NUCLEAR REACTIONS, NUCLEI, NUCLEON BEAMS, NUCLEON REACTIONS, NUCLEONS, NUMERICAL DATA, PARTICLE BEAMS, PARTICLE SOURCES, RADIATION DETECTION, RADIATION DETECTORS, RADIATION SOURCES, RADIOISOTOPES, RESOLUTION, SCATTERING, SCINTILLATION COUNTERS, SPECTRA, SPECTROMETERS, STABLE ISOTOPES, TARGETS
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