[en] Using the metallography and X-ray diffraction analysis the effect of the bias voltage on the substrate on the structure, morphology, texture, and lattice parameters of Nb coatings deposited by an inverted cylindrical magnetron has been investigated. It is shown that the coatings are characterized by increased lattice spacings compared with pure niobium, which can be associated with both oxygen and hydrogen saturation and the presence of compressive residual stresses. (paper)

[en] The paper presents the results of a study of the effect of bias voltage on a substrate made of a copper tube on the structure and residual stresses of W-coatings deposited by an inverted magnetron. It is shown that the critical process temperature at which residual compressive stresses of –1000 MPa (which lead to the beginning of the coating delamination process) are formed corresponds to ∼200⁰C and a substrate voltage of –100 V. At a bias voltage below –100 V, the coatings have a columnar structure. (paper)

[en] The results of the study of the bias voltage effect on the structure, texture and residual stresses of Ta-coatings deposited using an inverted magnetron on a copper substrate are presented. It is shown that variations in residual stresses are non-monotonic, which is determined by the complex effect of the bias voltage on the process temperature, which affects both the formation of mechanical and thermal stresses and their partial relaxation. (paper)

[en] A multilayer composite ∼1000 μm in thickness, formed by niobium and molybdenum layers (number of layers n = 230), is obtained by vacuum-arc deposition with subsequent siliconization of the surface layers at a temperature of 1200 °C. Layer-by-layer phase analysis is performed by X-ray diffraction and scanning electron microscopy. It is found that in the surface layers ∼130 μm in thickness, single-phase silicides (Nb _x Mo_1_- _x )Si_2 are formed with the hexagonal C40 structure (Strukturbericht designations). Alternating layers of solid solutions based on niobium and molybdenum with a body-centered cubic (BCC) lattice are observed within the composite. The formation of solid solutions caused by heating of the coating leads to convergence of the values of the linear thermal expansion coefficient and Young's modulus at the interface between the layers. (paper)

[en] The article presents a system of 3 consecutively installed inverted magnetrons for applying coatings on axisymmetric substrates and one conventional cylindrical magnetron for cleaning substrates. The circuit of the inverted magnetron and its characteristics are shown. The modes of formation of Mo-Nb multilayer composites on cylindrical substrates are given. (paper)

[en] This work is devoted to the study of the formation of the structure, crystallographic texture and residual stresses in multilayer Nb/Mo coatings deposited by inverted magnetrons on a tubular substrate made of a chromium-nickel alloy. Microprobe analysis of the obtained samples did not show the presence of Nb–Mo solid solutions resulting from mutual diffusion, which is most likely caused by low heating of the coating material during deposition. The results of the studies show that in the outer layers of the multilayer coating, residual stresses are characterized by relatively low values. It is likely that the alternation of layers of refractory metals that differ in thermal linear expansion coefficient values leads to mutual compensation of thermal stresses. Thus, the value of the residual stresses of a multilayer coating of any thickness is comparable to a two-layer coating. The texture effect in a multilayer coating is insignificant compared to the effect of solid solution formation, so high-temperature annealing will help to equalize the elastic characteristics and, accordingly, the stress state in the coating. (paper)