[en] The reaction kinetic processes of species produced in a pulsed TEA CO₂ laser induced silane plasma were studied with the time-resolved OES. It is showed that the time position of main peaks for different fragments' characteristic lines are appreciably different. The reaction kinetic processes are discussed based on the results. By comparing the time evolution of the lines of the fragments and considering the other results of OES, the authors infer that the final reaction channel of the laser-induced silane plasma is a Si producing channel

[en] Profiles of H_α, H_β and H_γ lines, emitted from a TEA CO₂ laser induced silane plasma, are measured with an optical multichannel analyzer (OMA III). The experimental results show that FWHM (full width of half maximum) of the three lines increases with the main quantum number of the corresponding upper level of the transitions, i.e. Δλ_1/2(H_α)<Δλ_1/2(H_β)<Δλ_1/2(H_γ), this suggests that the dominant broadening mechanism of the lines is Stark broadening. Fitting the measured H_α profile to theoretical data of Stark broadening. two parameters of the plasma are obtained: average electron density N = 10¹⁷ cm^-3 and electron temperature T = 40,000 K. From time resolved measurements of H_β profile, a curve of electron density versus time is derived