[en] The plasma generated by a coaxial plasma puff-gun was studied using a double laugmuir probe and spectroscopy. The voltage of the energy-stored capacitor of the gun is from 1.5 kV to 4kV, the plasma electron temperature 10 eV to 20 eV, the kinetic energy 45 eV to 310 eV, and the density is from 5 x 10¹³ to 7 x 10¹⁴ cm^-3

[en] Hydrogenated carbon thin films were fabricated on the surface of polyethylene terephthalate (PET) by radio frequency plasma enhanced chemical vapor deposition (r.f. PECVD). The film structure properties were studied by means of atomic force microscope (AFM), x-ray photo-electron (XPS), laser Raman spectroscopy, Fourier-transform infrared spectra (FTIR), etc. The barrier property of the film was conducted on the water vapor permeation instrument. The results show that nano-hydrogenated carbon films have been deposited on PET surface and they are mainly composed of sp² and sp³ hybridized hydrogenated carbon compounds. Plasma parameters influence the films' growth rate and structure characteristics. The film reduces the water vapor permeation ratio of the PET by 7 times at a film thickness of only 900 nm. (authors)