[en] The mechanism of light elements incoherent scatter has been studied. By combining the incoherent scatter intensity with character line intensity to calculate the appearance concentration, the Lucas-Tooth and Pyne intensity correction model is corrected. By using this model and least-square method of regression of linear equations, the x-ray fluorescence analysis method is used for determining Sc₂O₃, Y₂O₃, La₂O₃, Tm₂O₃ and Lu₂O₃ in Li₂CO₃ which are standard samples in the laboratory. The precision of the method is better than 4.0%, and the best is up to 1.4%. Advantages of the method are accurate, easy to control, fast and various elements can be simultaneously determined