Orientational dependence of damage in Te+ implanted germanium single crystals
AbstractAbstract
[en] Germanium <100>, <110>, and <111> single crystals implanted with 46 keV Te ions with doses between 1012 and 1015 ions cm-2 have been analyzed by TEM of surface replicas, RHEED, and MeV He+ channelling. The combination of these types of measurements reveals the effect of crystalline orientation on heavy ion damage in a germanium lattice. The degree of disorder in the bulk, resulting from low dose implantation is lowest at <110> and <111> channelling and highest at <100> channelling. (author)
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Journal Article
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Radiation Effects; ISSN 0033-7579; ; v. 69(3-4); p. 191-198
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