[en] Rutherford backscattering spectra have been calculated with a parallel version of TRIM.SP for 0.5 and 1 MeV 4He normally on a target consisting of about 100 nm Au on Si. The calculated energy distributions are compared with experimental distributions and with those calculated with SIMNRA including double scattering. The contributions of plural scattering on the distributions are determined
Journal
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms; ISSN 0168-583X; 
; CODEN NIMBEU; v. 153(1-4); p. 337-344
; CODEN NIMBEU; v. 153(1-4); p. 337-344