Structural properties of nanoscale multilayered TiN / ZrN coatings
AbstractAbstract
[en] Vacuum arc deposition of a cathodes method (C-PVD) was used for deposition of multilayered coatings, based on nitrides of refractory metals, such as TiN / ZrN. Total thickness of the coatings was 11 - 19 μm, thickness of bilayers varied from 20 to 800 nm for different samples depending on different deposition conditions, such as bias potential, arc current, pressure of nitrogen in the deposition chamber. XRD, RBS, SEM, HR-TEM and STEM with local microanalysis, as well as nanoindentation were used for investigations of structure and properties of the mentioned above coatings. RBS measurements showed, that in all layers of all coatings stoichiometric nitrides TiN, ZrN were formed with an average atomic concentrations 50 at. % (respectively to the type of coatings). Fabricated coatings demonstrated good mechanical properties, such as wear resistance and adhesion to the substrate, as well as quite high hardness. (author)
Primary Subject
Source
Nano-2016: 4. International Conference on Nanotechnologies; Tbilisi (Georgia); 24-27 Oct 2016
Record Type
Journal Article
Literature Type
Conference
Journal
Nano Studies; ISSN 1987-8826; ; (no 2016); p. 168
Country of publication
Descriptors (DEI)
ADHESION, ADMINISTRATIVE PROCEDURES, CATHODES, COATINGS, ECOLOGICAL CONCENTRATION, HARDNESS, MICROANALYSIS, NANOSTRUCTURES, NITROGEN, PHYSICAL VAPOR DEPOSITION, POTENTIALS, REFRACTORY METALS, RUTHERFORD BACKSCATTERING SPECTROSCOPY, SCANNING ELECTRON MICROSCOPY, THICKNESS, TITANIUM NITRIDES, TRANSMISSION ELECTRON MICROSCOPY, WEAR RESISTANCE, X-RAY DIFFRACTION, ZIRCONIUM NITRIDES
Descriptors (DEC)
COHERENT SCATTERING, DEPOSITION, DIFFRACTION, DIMENSIONS, ELECTRODES, ELECTRON MICROSCOPY, ELEMENTS, MECHANICAL PROPERTIES, METALS, MICROSCOPY, NITRIDES, NITROGEN COMPOUNDS, NONMETALS, PNICTIDES, SCATTERING, SPECTROSCOPY, SURFACE COATING, TITANIUM COMPOUNDS, TRANSITION ELEMENT COMPOUNDS, ZIRCONIUM COMPOUNDS
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