Minami Kaneko, Kazuya Kudo, Kaito Mishima, Kazuki Ebisawa, Ken Saito, Fumio Uchikoba. Design and Fabrication of Electromagnetic Induction Type MEMS Generators with Ceramic Magnetic Circuit. In 2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2018, Auckland, New Zealand, July 9-12, 2018. pages 580-585, IEEE, 2018. [doi]
Abstract is missing.