Energy method for the optimization of a silicon resonant accelerometer

Jing Zhang, Qin Shi, Yan Su, An Ping Qiu. Energy method for the optimization of a silicon resonant accelerometer. In IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2016, Proceedings, Taipei, Taiwan, May 23-26, 2016. pages 1-6, IEEE, 2016. [doi]

Abstract

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