Self-Heating Effect of Device-Circuit with Back-side Power Delivery Network beyond 3nm Node

Pan Zhao, Jinghan Xu, Taoyu Zhou, Songhan Zhao, Naiqi Liu, Xinpeng Li, YanDong He, Xiaoyan Liu, Gang Du. Self-Heating Effect of Device-Circuit with Back-side Power Delivery Network beyond 3nm Node. In IEEE International Reliability Physics Symposium, IRPS 2024, Grapevine, TX, USA, April 14-18, 2024. pages 1-6, IEEE, 2024. [doi]

Abstract

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