IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH)’s Post

On 26 October we are presenting at the 20th International Conference on Precision Engineering (ICPE2024), Sendai, Japan: https://lnkd.in/e2UByA_P. Davi Brasil, Steffen Hesse, Michael Katzschmann, Ludwig Herzog, Thomas Fröhlich, and Thomas Kissinger from IMMS and Technische Universität Ilmenau give an insight into their “Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor”.   #Highprecision dimensional processes in modern #manufacturing and #metrology demand positioning systems that offer sub-10 nm performance. Here, the authors present the analysis of a long-range #nanopositioning system designed to reach results close to this requirement. The system operates within a volume of Ø200 mm x 25 mm and implements 6-DOF positioning control based on direct magnetic drives, differential laser interferometers and an autocollimator.   Additionally, it integrates a laser focus sensor (LFS), thereby making it suitable for a wide range of applications. Experimental evaluations showed remarkable reproducibility results in long-range distance measurements, with standard deviation values below 15 nm over a range of 155 mm. These experiments involved the measurement of positions on a cross grid artifact by unconventional use of the LFS and applying corrections for environmental conditions and sample temperature variation. The results of the analysis highlight the suitability of the stage architecture for precise positioning tasks in a variety of industrial and scientific environments.   At IMMS we are not only pushing the limits of what is technically feasible but also working on the transfer of the latest #research results to industry. Find more on our magnetic 6D #directdrives with #nanometer #precision under www.imms.de/nmdrives. If you are interested in a joint #develompent of your mechatronic solution, read more under www.imms.de/mechatronics or contact Ludwig Herzog directly.   The results presented were obtained in the Research Training Group 2182 on Tip- and laser-based 3D-Nanofabrication in extended macroscopic working areas (NanoFab, www.imms.de/nanofab). NanoFab is funded by the German Research Foundation (DFG) under the funding code DFG GRK 2182.

Sebastian L.

🧭 Dr.-Ing. | Head of R&D at Kompass GmbH | Author | Co-Founder | Compliant Mechanisms Expert | Table Tennis Enthusiast

1mo

Sounds like an exciting contribution in the field of nanopositioning 👍

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