Division of Electromagnetics and Nanoelectronics (EMN)’s Post

In this study, a report is prepared on significantly low specific contact resistivity of alloyed and non-alloyed ohmic contacts fabricated on an as-grown n+-GaN layer and measured with the transfer length method. A low ρc = 8 × 10−8 Ω cm2 is extracted for the alloyed Ti/Al/Ni/Au, and ρc = 4 × 10−7 Ω cm2 for the unannealed Ti/Pd/Au. To achieve these, a highly doped n+-GaN layer with ND = 1.5 × 1019 cm−3 is used. The results are derived from a study of three different metal contact stacks, namely Ti/Al/Ni/Au (20 nm/300 nm/20 nm/400 nm), Ti/Pd/Au (2 nm/5 nm/200 nm), and Mo/Au (30 nm/200 nm). The Ti/Al/Ni/Au metal contact is studied in both annealed and non-annealed conditions, whereas for the Ti/Pd/Au and Mo/Au ohmic contacts, a study is conducted without annealing. Their performance and thermal stability are evaluated with a four-probe TLM, with temperatures ranging from 25 to 150 °C. Finally, a theoretical model based on thermionic emission theory is employed to gain a deeper understanding of the physical mechanisms governing the behavior of the ohmic contacts. This study was conducted by Adamantia Logotheti, Navya Sri Garigapati, Ph.D and Erik Lind from The Division of Electromagnetics and Nanoelectronics (EMN) with collaborations from the Center of III-Nitride Technology at Lund University https://lnkd.in/g7SF5kMX

Low Resistivity n‐type GaN Ohmic Contacts on GaN Substrates

Low Resistivity n‐type GaN Ohmic Contacts on GaN Substrates

onlinelibrary.wiley.com

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